Nitrogen Doping Characterization of ZnO Prepared by Atomic Layer Deposition
نویسندگان
چکیده
منابع مشابه
Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition
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ژورنال
عنوان ژورنال: Journal of the Korean Institute of Electrical and Electronic Material Engineers
سال: 2014
ISSN: 1226-7945
DOI: 10.4313/jkem.2014.27.10.642